GAS SUPPLY SYSTEM
반도체 제조 공정 중 해당 공정에 필요한 원료 GAS를 원하는 조건(압력)으로 안전하고
청정이 유지된 상태에서 원료 GAS의 PURITY가 보존된 상태로 공급시키기 위한 장치입니다.
Acoustic Cleaner (ACS)
NOx Reduction Technology (CCA)
Boiler Diagnostic System (VALMET)
SCR Catalyst & Services (CORMETECH)
-
General Function
- 보일러 탈질 설비(SCR Reactor) 의 표면에 Ash가 쌓이거나 달라 붙는 것을 방지하는 제품 - 음파를 이용하여 엷은 공간과 접근이 어려운 부분에도 효과적으로 Scale을 제거 및 방지할 수 있고 기계적인 충격 없음 - 원가절감, 생산성 증대 및 원활한 장비 운전을 위한 Cleaning SystemADVANTAGES
- Low Initial Investment - Easy Installation - Low Installation Cost - Low Maintenance Cost - Low Operational Cost - No Structural Damage - No Mechanical Wear on Equipment Surfaces - No Corrosion or Blockage - Cleaning of Inaccessible Parts - Continuous Plant Operation - Design & Installation Expertise from the ACS Professional
APPLICATIONS: | |
---|---|
Material | SS41 2.3t Or 3.2t(For SiH4) |
Wire-reinforced Safety Glass | Wire Depth 5t(Defence film Option) |
Color | Structure Powder |
Dimension | 1Bottle : 500 x 550 x 2000 |
2Bottle : 800 x 550 x 2000 | |
3Bottle : 1100 x 550 x 2000 | |
Material | SUS 304 (2t Polishing Plate) |
Material | UHP Component(SUS316L VIM-VAR) |
PLC | Omron CS-1 Series (CPU-45H) |
Power | Heater Misapplication : 220V Single Phase 5A |
Heater Application : 220V Single Phase 25A | |
Touch | PROFACE GP - 577R(Color Type) |
Communication | Omron CLK Communication |
Parts | Description | Remarks |
---|---|---|
Enclosure | Material | SS41 2.3t Or 3.2t(For SiH4) |
Wire-reinforced Safety Glass | Wire Depth 5t(Defence film Option) | |
Color | Structure Powder | |
Dimension | 1Bottle : 500 x 550 x 2000 | |
2Bottle : 800 x 550 x 2000 | ||
3Bottle : 1100 x 550 x 2000 | ||
Panel | Material | SUS 304 (2t Polishing Plate) |
Parts | Material | UHP Component(SUS316L VIM-VAR) |
Controller | PLC | Omron CS-1 Series (CPU-45H) |
Power | Heater Misapplication : 220V Single Phase 5A | |
Heater Application : 220V Single Phase 25A | ||
Touch | PROFACE GP - 577R(Color Type) | |
Communication | Omron CLK Communication |
GAS SUPPLY SYSTEM
반도체 제조 공정 중 해당 공정에 필요한 원료 GAS를 원하는 조건(압력)으로 안전하고
청정이 유지된 상태에서 원료 GAS의 PURITY가 보존된 상태로 공급시키기 위한 장치입니다.
Acoustic Cleaner (ACS)
NOx Reduction Technology (CCA)
Boiler Diagnostic System (VALMET)
SCR Catalyst & Services (CORMETECH)
-
General Function
- 보일러 화로(Furnace) 내에 장착되어 있는 Burner를 교체 혹은 개조 하여 NOx를 저감 및 보일러 연소 효율을 향상 시키는 기술 - Burner 뿐만 아니라 NOx 저감에 도움을 주는 기술을 보유 (OFA, FGR, SNCR, SCR, RRI, CT 등) - 경쟁사 대비 NOx 저감 능력이 뛰어나며 Customizing 설계로 보일러 연소 효율이 우수함 -
Burners & Combustion Systems
Applications:
- Utility Power Boilers – Wall-fired, T-fired - Package Boilers - Recovery Boilers – Startup & Aux Fuel Burners
Burner Heat Input Capacities:
- 25 MMBtu/hr to 300+ MMBtu/hr
Fuels: Any combustible gaseous or liquid fuel
- Natural gas, Refinery gases, Propane, Hydrogen, Landfill / Digester gases - Process Off Gases and Liquids - Hazardous Waste Gases and Liquids - Heavy Fuel Oil - Ultra Heavy Fuel Oils (Pitch/Bitumen) - Light Fuel Oils, Kerosene - Biomass (wood, nut shells, etc.)
Low NOx Systems
- Multi-Fuel Burners firing liquids & gases up to 5 fuels per burner - Overfire Air - FGR - H2O Injection
Performance Upgrades
- Flame Stability Improvement - CO/Carbon Loss Reduction - Reliability improvements - Life Extension
-
BSelective Non-Catalytic Reduction (SNCR) Systems
SNCR System Design
- Injection of Urea or Ammonia (mixed with air and water) into Furnace Section of Field Erected Boilers - NOx Reduction Reaction Temperature Window: 900 – 1,150 C - Optimum Injector Locations determined by CFD Modeling of Furnace and Exhaust Gas Profiles - Typical NOx reduction of 35%-65% - CCA Developed Unique Tilting Injector Design to Improve Efficiency and Reduce Equipment Costs -
Selective Catalytic Reduction (SCR) System
SCR System Design
- CCA Developed and Implemented Unique, Patented Direct Injection SCR process on Engines, Boilers and Turbines ┕ Reduces capital and operation costs by as much as 60% - NOx Reduction Reaction Temperature Window: 175 – 482 C - Optimum Injector Locations determined by CFD Modeling of Furnace and Exhaust Gas Profiles - Typical NOx reduction of 75%-95% - CCA Specializes in Urea based SCR ┕ Urea is a safer alternative to ammonia as an SCR reagent
Injection Distribution Module
Reagent Storage Tank
Urea or Ammonia Pump Skid
SNCR Injectors
Reactor Box w/ Catalyst
Ammonia / Urea Injector
Modular Injection Skid
Reagent Storage Tank
GAS SUPPLY SYSTEM
반도체 제조 공정 중 해당 공정에 필요한 원료 GAS를 원하는 조건(압력)으로 안전하고
청정이 유지된 상태에서 원료 GAS의 PURITY가 보존된 상태로 공급시키기 위한 장치입니다.
Acoustic Cleaner (ACS)
NOx Reduction Technology (CCA)
Boiler Diagnostic System (VALMET)
SCR Catalyst & Services (CORMETECH)
-
General Function
- IR Camera (보일러 이미징 시스템) 고정식 타입 - IR Camera (보일러 이미징 시스템) 휴대용 타입 - Acoustic Pyrometer (보일러 노내 온도 분포 측정 시스템)
GAS SUPPLY SYSTEM
반도체 제조 공정 중 해당 공정에 필요한 원료 GAS를 원하는 조건(압력)으로 안전하고
청정이 유지된 상태에서 원료 GAS의 PURITY가 보존된 상태로 공급시키기 위한 장치입니다.
Acoustic Cleaner (ACS)
NOx Reduction Technology (CCA)
Boiler Diagnostic System (VALMET)
SCR Catalyst & Services (CORMETECH)
-
General Function
- SCR Catalyst for Coal, Oil, and Gas - DUSTBUSTER SCR Catalyst - SCR Catalyst Regeneration - SCR Catalyst Management Service - SField Services Support