| Parts |
Description |
Remarks |
| Enclosure |
Material |
SS41 2.3t Or 3.2t(For SiH4) |
| Wire-reinforced Safety Glass |
Wire Depth 5t(Defence film Option) |
| Color |
Structure Powder |
| Dimension |
1Bottle : 500 x 550 x 2000 |
| 2Bottle : 800 x 550 x 2000 |
| 3Bottle : 1100 x 550 x 2000 |
| Panel |
Material |
SUS 304 (2t Polishing Plate) |
| Parts |
Material |
UHP Component(SUS316L VIM-VAR) |
| Controller |
PLC |
Omron CS-1 Series (CPU-45H) |
| Power |
Heater Misapplication : 220V Single Phase 5A |
| Heater Application : 220V Single Phase 25A |
| Touch |
PROFACE GP - 577R(Color Type) |
| Communication |
Omron CLK Communication |
반도체/LCD분야 > GAS SUPPLY SYSTEM > GAS CABINET
