Parts |
Description |
Remarks |
Enclosure |
Material |
SS41 2.3t Or 3.2t(For SiH4) |
Wire-reinforced Safety Glass |
Wire Depth 5t(Defence film Option) |
Color |
Structure Powder |
Dimension |
1Bottle : 500 x 550 x 2000 |
2Bottle : 800 x 550 x 2000 |
3Bottle : 1100 x 550 x 2000 |
Panel |
Material |
SUS 304 (2t Polishing Plate) |
Parts |
Material |
UHP Component(SUS316L VIM-VAR) |
Controller |
PLC |
Omron CS-1 Series (CPU-45H) |
Power |
Heater Misapplication : 220V Single Phase 5A |
Heater Application : 220V Single Phase 25A |
Touch |
PROFACE GP - 577R(Color Type) |
Communication |
Omron CLK Communication |