GAS CABINETHOME  반도체/LCD분야 > GAS SUPPLY SYSTEM > GAS CABINET

General Function

  • TOXIC GAS PIPING
  • CORROSIVE GAS PIPING
  • LIQUID GAS PIPING
  • FLAMMABLE GAS PIPING
  • INERT GAS PIPING
  • TOXIC GAS PIPING
  • CORROSIVE GAS PIPING
  • LIQUID GAS PIPING
  • FLAMMABLE GAS PIPING
  • INERT GAS PIPING





Parts Description Remarks
Enclosure Material SS41 2.3t Or 3.2t(For SiH4)
Wire-reinforced Safety Glass Wire Depth 5t(Defence film Option)
Color Structure Powder
Dimension 1Bottle : 500 x 550 x 2000
2Bottle : 800 x 550 x 2000
3Bottle : 1100 x 550 x 2000
Panel Material SUS 304 (2t Polishing Plate)
Parts Material UHP Component(SUS316L VIM-VAR)
Controller PLC Omron CS-1 Series (CPU-45H)
Power Heater Misapplication : 220V Single Phase 5A
Heater Application : 220V Single Phase 25A
Touch PROFACE GP - 577R(Color Type)
Communication Omron CLK Communication
개인정보취급방침이메일 무단수집거부ADMIN
KSIA
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