GAS SUPPLY SYSTEM
반도체 제조 공정 중 해당 공정에 필요한 원료 GAS를 원하는 조건(압력)으로 안전하고
청정이 유지된 상태에서 원료 GAS의 PURITY가 보존된 상태로 공급시키기 위한 장치입니다.
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General Function
- Toxic gas piping - Corrosive gas piping - Liquid gas piping - Flammable gas piping - Inert gas piping - Toxic gas piping - Corrosive gas piping - Liquid gas piping - Flammable gas piping - Inert gas piping
| Parts | Description | Remarks |
|---|---|---|
| Enclosure | Material | SS41 2.3t Or 3.2t(For SiH4) |
| Wire-reinforced Safety Glass | Wire Depth 5t(Defence film Option) | |
| Color | Structure Powder | |
| Dimension | 1Bottle : 500 x 550 x 2000 | |
| 2Bottle : 800 x 550 x 2000 | ||
| 3Bottle : 1100 x 550 x 2000 | ||
| Panel | Material | SUS 304 (2t Polishing Plate) |
| Parts | Material | UHP Component(SUS316L VIM-VAR) |
| Controller | PLC | Omron CS-1 Series (CPU-45H) |
| Power | Heater Misapplication : 220V Single Phase 5A | |
| Heater Application : 220V Single Phase 25A | ||
| Touch | PROFACE GP - 577R(Color Type) | |
| Communication | Omron CLK Communication |
